YBCO thin films on TiO 2 buffer layer deposited by RF magnetron sputtering

Yoshitaka Nakamura, Yuta Isozaki, Masashi Miura, Tomohiro Kuroiwa, Yutaka Yoshida, Kaname Matsumoto, Ataru Ichinose, Shigeru Horii, Masashi Mukaida, Shigetoshi Ohshima

    研究成果: ジャーナルへの寄稿学術誌査読

    3 被引用数 (Scopus)

    抄録

    Rutile structure TiO 2 buffer layers and YBa 2Cu 3O 7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin (110) oriented rutile structure TiO 2 buffer layers. The crystal structure of TiO 2 thin films changed from (100) oriented anatase structure TiO 2 to (110) oriented rutile structure TiO 2 with increasing substrate temperature. The (110) oriented rutile structure TiO 2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on (110) oriented rutile structure TiO 2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.

    本文言語英語
    ページ(範囲)3028-3030
    ページ数3
    ジャーナルIEEE Transactions on Applied Superconductivity
    15
    2 PART III
    DOI
    出版ステータス出版済み - 6月 2005

    !!!All Science Journal Classification (ASJC) codes

    • 電子材料、光学材料、および磁性材料
    • 凝縮系物理学
    • 電子工学および電気工学

    フィンガープリント

    「YBCO thin films on TiO 2 buffer layer deposited by RF magnetron sputtering」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

    引用スタイル