TY - GEN
T1 - X-ray irradiation test of a MEMS-based X-ray optic
AU - Ogawa, Tomohiro
AU - Ezoe, Yuichiro
AU - Kakiuchi, Takuya
AU - Ikuta, Masahiro
AU - Sato, Mayu
AU - Ohashi, Takaya
AU - Mitsuishi, Ikuyuki
AU - Mitsuda, Kazuhisa
AU - Morishita, Kohei
AU - Nakajima, Kazuo
N1 - Publisher Copyright:
© 2014 University of Strathclyde.
PY - 2014/10/14
Y1 - 2014/10/14
N2 - MEMS technolgies can provide future space missions with ultra light-wight and high resolution optics. We conducted an X-ray irradiation test of our first MEMS-based Wolter type-I optic. However, a focus was weak and wide spread. Hence, we improved fabrication processes and an alignment system. In this paper, we report on results of the latest X-ray irradiation test of our new Wolter type-I optic. The angular resolution and effective area were 4.1 arcmin and 32 mm2 both of which are 3 and 40 times better than those in the first test.
AB - MEMS technolgies can provide future space missions with ultra light-wight and high resolution optics. We conducted an X-ray irradiation test of our first MEMS-based Wolter type-I optic. However, a focus was weak and wide spread. Hence, we improved fabrication processes and an alignment system. In this paper, we report on results of the latest X-ray irradiation test of our new Wolter type-I optic. The angular resolution and effective area were 4.1 arcmin and 32 mm2 both of which are 3 and 40 times better than those in the first test.
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U2 - 10.1109/OMN.2014.6924555
DO - 10.1109/OMN.2014.6924555
M3 - Conference contribution
AN - SCOPUS:84908023933
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 131
EP - 132
BT - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PB - IEEE Computer Society
T2 - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Y2 - 17 August 2014 through 21 August 2014
ER -