X-ray imaging test for a single-stage MEMS X-ray optical system

Ikuyuki Mitsuishi; Yuichiro Ezoe; Kensuke Ishizu; Teppei Moriyama; Yoshitomo Maeda; Takayuki Hayashi; Takuro Sato; Makoto Mita; N. Y. Yamasaki; K. Mitsuda; Mitsuhiro Horade; Susumu Sugiyama; Raul E. Riveros; Taylor Boggs; Hitomi Yamaguchi; Yoshiaki Kanamori; Kohei Morishita; Kazuo Nakajima; Ryutaro Maeda

doi:10.1109/OMEMS.2010.5672138

X-ray imaging test for a single-stage MEMS X-ray optical system

Ikuyuki Mitsuishi, Yuichiro Ezoe, Kensuke Ishizu, Teppei Moriyama, Yoshitomo Maeda, Takayuki Hayashi, Takuro Sato, Makoto Mita, N. Y. Yamasaki, K. Mitsuda, Mitsuhiro Horade, Susumu Sugiyama, Raul E. Riveros, Taylor Boggs, Hitomi Yamaguchi, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

研究成果: 書籍/レポートタイプへの寄稿 › 会議への寄与

抄録

An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al K_α 1.49 keV for the first time. The image quality estimated as a half power diameter was ∼20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 ìm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.

本文言語	英語
ホスト出版物のタイトル	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
ページ	151-152
ページ数	2
DOI	https://doi.org/10.1109/OMEMS.2010.5672138
出版ステータス	出版済み - 2010
外部発表	はい
イベント	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, 日本継続期間: 8月 9 2010 → 8月 12 2010

出版物シリーズ

名前	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

その他

その他	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
国/地域	日本
City	Sapporo
Period	8/9/10 → 8/12/10

!!!All Science Journal Classification (ASJC) codes

制御およびシステム工学
電子工学および電気工学

文献へのアクセス

10.1109/OMEMS.2010.5672138

他のファイルとリンク

引用スタイル

Mitsuishi, I., Ezoe, Y., Ishizu, K., Moriyama, T., Maeda, Y., Hayashi, T., Sato, T., Mita, M., Yamasaki, N. Y., Mitsuda, K., Horade, M., Sugiyama, S., Riveros, R. E., Boggs, T., Yamaguchi, H., Kanamori, Y., Morishita, K., Nakajima, K., & Maeda, R. (2010). X-ray imaging test for a single-stage MEMS X-ray optical system. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (pp. 151-152). 記事 5672138 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). https://doi.org/10.1109/OMEMS.2010.5672138

X-ray imaging test for a single-stage MEMS X-ray optical system. / Mitsuishi, Ikuyuki; Ezoe, Yuichiro; Ishizu, Kensuke その他.
2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 151-152 5672138 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010).

研究成果: 書籍/レポートタイプへの寄稿 › 会議への寄与

Mitsuishi, I, Ezoe, Y, Ishizu, K, Moriyama, T, Maeda, Y, Hayashi, T, Sato, T, Mita, M, Yamasaki, NY, Mitsuda, K, Horade, M, Sugiyama, S, Riveros, RE, Boggs, T, Yamaguchi, H, Kanamori, Y, Morishita, K, Nakajima, K & Maeda, R 2010, X-ray imaging test for a single-stage MEMS X-ray optical system. in 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010., 5672138, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, pp. 151-152, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, Sapporo, 日本, 8/9/10. https://doi.org/10.1109/OMEMS.2010.5672138

Mitsuishi I, Ezoe Y, Ishizu K, Moriyama T, Maeda Y, Hayashi T その他. X-ray imaging test for a single-stage MEMS X-ray optical system. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 151-152. 5672138. (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). doi: 10.1109/OMEMS.2010.5672138

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abstract = "An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ∼20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 {\`i}m scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.",

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AU - Mitsuishi, Ikuyuki

AU - Ezoe, Yuichiro

AU - Ishizu, Kensuke

AU - Moriyama, Teppei

AU - Maeda, Yoshitomo

AU - Hayashi, Takayuki

AU - Sato, Takuro

AU - Mita, Makoto

AU - Yamasaki, N. Y.

AU - Mitsuda, K.

AU - Horade, Mitsuhiro

AU - Sugiyama, Susumu

AU - Riveros, Raul E.

AU - Boggs, Taylor

AU - Yamaguchi, Hitomi

AU - Kanamori, Yoshiaki

AU - Morishita, Kohei

AU - Nakajima, Kazuo

AU - Maeda, Ryutaro

PY - 2010

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AB - An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ∼20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 ìm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.

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T2 - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

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ER -

X-ray imaging test for a single-stage MEMS X-ray optical system

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出版物シリーズ

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!!!All Science Journal Classification (ASJC) codes

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