@inproceedings{4f9d3d35487e422c89b3b7a49eff273c,
title = "Weakly copper-fullerenol layer on chemical mechanical polishing using water soluble fullerenol",
author = "Hirotaka Kishida and Yasuhiro Takaya and Terutake Hayashi and Masaki Michihata and Ken Kokubo",
year = "2010",
language = "English",
isbn = "9781887706568",
series = "Proceedings - ASPE 2010 Annual Meeting",
pages = "293--296",
booktitle = "Proceedings - ASPE 2010 Annual Meeting",
note = "25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 ; Conference date: 31-10-2010 Through 04-11-2010",
}