TY - GEN
T1 - Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy
AU - Nakamura, Daisuke
AU - Takao, Takayuki
AU - Oki, Yuji
AU - Maeda, Mitsuo
N1 - Publisher Copyright:
© 2003 IEEE.
PY - 2003
Y1 - 2003
N2 - A nanometer-scaled layer removal of a surface of poly-methylmethacrylate was attained by a single laser shot from a pulsed excimer laser ablation. The combination of the removal and laser fluorescence spectroscopy demonstrated a nanometer-scaled element analysis on a solid surface.
AB - A nanometer-scaled layer removal of a surface of poly-methylmethacrylate was attained by a single laser shot from a pulsed excimer laser ablation. The combination of the removal and laser fluorescence spectroscopy demonstrated a nanometer-scaled element analysis on a solid surface.
UR - https://www.scopus.com/pages/publications/84955326457
UR - https://www.scopus.com/pages/publications/84955326457#tab=citedBy
U2 - 10.1109/CLEOPR.2003.1277028
DO - 10.1109/CLEOPR.2003.1277028
M3 - Conference contribution
AN - SCOPUS:84955326457
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
SP - 478
BT - CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Y2 - 15 December 2003 through 19 December 2003
ER -