Tight-binding quantum chemical molecular dynamics simulations for the elucidation of chemical reaction dynamics in SiC etching with SF6/O2 plasma
Hiroshi Ito, Takuya Kuwahara, Kentaro Kawaguchi, Yuji Higuchi, Nobuki Ozawa, Momoji Kubo
研究成果: ジャーナルへの寄稿 › 学術誌 › 査読
12
被引用数
(Scopus)