@conference{537ebe2dcefa433fb251793dea3c485f,
title = "Thermally Oxidized Yttrium and Scandium Gate Dielectrics on Germanium with High Interfacial and Film Qualities",
author = "Hiroki Kanakogi and Wei-Chen Wen and Keisuke Yamamoto and Dong Wang and Hiroshi Nakashima",
year = "2020",
month = sep,
day = "29",
doi = "10.7567/ssdm.2020.a-4-02",
language = "English",
pages = "33--34",
note = "2020 International Conference on Solid State Devices and Materials (SSDM2020) ; Conference date: 27-09-2020 Through 30-09-2020",
}