抄録
We investigated the growth conditions of cubic GaN (c-GaN) by ab initio-based approach which incorporates free energy of vapor phase. It is known that a c-GaN is a metastable phase and wurtzite GaN (h-GaN), which is a stable phase of GaN, is easily incorporated in the c-GaN crystal during growth. h-GaN is formed in the area grown on {1 1 1} faceted surface. In the present study, therefore, we studied the growth conditions of {1 1 1} facet formation in order to suppress h-GaN mixing. The results suggest that we can suppress the {1 1 1} facet formation, i.e., h-GaN mixing, by controlling the growth conditions such as temperature and gallium beam equivalent pressure.
| 本文言語 | 英語 |
|---|---|
| ページ(範囲) | 3106-3109 |
| ページ数 | 4 |
| ジャーナル | Journal of Crystal Growth |
| 巻 | 311 |
| 号 | 10 |
| DOI | |
| 出版ステータス | 出版済み - 5月 1 2009 |
!!!All Science Journal Classification (ASJC) codes
- 凝縮系物理学
- 無機化学
- 材料化学
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