The 24th Symposium on Plasma Science for Materials (SPSM-24)

T. Shirafuji, Y. Setsuhara, M. Shiratani, T. Kaneko, T. Watanabe, N. Ohtake

研究成果: ジャーナルへの寄稿 › 編集 › 査読

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@article{90b8939cbff5485c8ae840971b2010d0,

title = "The 24th Symposium on Plasma Science for Materials (SPSM-24)",

author = "T. Shirafuji and Y. Setsuhara and M. Shiratani and T. Kaneko and T. Watanabe and N. Ohtake",

year = "2012",

month = nov,

day = "15",

doi = "10.1016/j.tsf.2012.10.002",

language = "English",

volume = "523",

pages = "1",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - The 24th Symposium on Plasma Science for Materials (SPSM-24)

AU - Shirafuji, T.

AU - Setsuhara, Y.

AU - Shiratani, M.

AU - Kaneko, T.

AU - Watanabe, T.

AU - Ohtake, N.

PY - 2012/11/15

Y1 - 2012/11/15

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U2 - 10.1016/j.tsf.2012.10.002

DO - 10.1016/j.tsf.2012.10.002

M3 - Editorial

AN - SCOPUS:84869017586

SN - 0040-6090

VL - 523

SP - 1

JO - Thin Solid Films

JF - Thin Solid Films

ER -