Synthesis of corn-shape carbon nanofibers on Si and Mo substrates by bias-enhanced microwave plasma chemical vapor deposition

Y. Hayashi; T. Tokunaga; Y. Yogata; S. Toh; K. Kaneko; T. Soga; T. Jimbo

doi:10.1016/j.diamond.2004.01.020

Synthesis of corn-shape carbon nanofibers on Si and Mo substrates by bias-enhanced microwave plasma chemical vapor deposition

Y. Hayashi
, T. Tokunaga
, Y. Yogata
, S. Toh
, K. Kaneko
, T. Soga
, T. Jimbo

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

5 被引用数 (Scopus)

抄録

A new type of corn-shape carbon nanofibers (CCNFs) with metal-free tips was fabricated and their characteristics were investigated. The CCNFs were grown on Ni/SiO₂/Si and Ni/Mo mesh substrates by a microwave plasma-enhanced chemical-vapor deposition method using CH₄ and H₂ gases with the technique of bias enhanced growth method. Transmission electron microscopy and selected area electron diffraction show that CCNFs were composed of thick cylindrical pure graphite walls, and had nanometer-sized tips with roots. The tips' apex angles of CCNFs were dependent on the substrate temperature, as the cone angles of 20, 39 and 60°.

本文言語	英語
ページ（範囲）	1198-1202
ページ数	5
ジャーナル	Diamond and Related Materials
巻	13
号	4-8
DOI	https://doi.org/10.1016/j.diamond.2004.01.020
出版ステータス	出版済み - 4月 2004

!!!All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
化学一般
機械工学
材料化学
電子工学および電気工学

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10.1016/j.diamond.2004.01.020

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引用スタイル

@article{4207727423f748a99277e5f74b2b591e,

title = "Synthesis of corn-shape carbon nanofibers on Si and Mo substrates by bias-enhanced microwave plasma chemical vapor deposition",

abstract = "A new type of corn-shape carbon nanofibers (CCNFs) with metal-free tips was fabricated and their characteristics were investigated. The CCNFs were grown on Ni/SiO2/Si and Ni/Mo mesh substrates by a microwave plasma-enhanced chemical-vapor deposition method using CH4 and H2 gases with the technique of bias enhanced growth method. Transmission electron microscopy and selected area electron diffraction show that CCNFs were composed of thick cylindrical pure graphite walls, and had nanometer-sized tips with roots. The tips' apex angles of CCNFs were dependent on the substrate temperature, as the cone angles of 20, 39 and 60°.",

author = "Y. Hayashi and T. Tokunaga and Y. Yogata and S. Toh and K. Kaneko and T. Soga and T. Jimbo",

note = "Funding Information: This work was partly supported by {\textquoteleft}Nanotechnology Support Project{\textquoteright} of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, carried out at Research Laboratory of High Voltage Electron Microscopy at Kyushu University.",

year = "2004",

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doi = "10.1016/j.diamond.2004.01.020",

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AU - Hayashi, Y.

AU - Tokunaga, T.

AU - Yogata, Y.

AU - Toh, S.

AU - Kaneko, K.

AU - Soga, T.

AU - Jimbo, T.

N1 - Funding Information: This work was partly supported by ‘Nanotechnology Support Project’ of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, carried out at Research Laboratory of High Voltage Electron Microscopy at Kyushu University.

PY - 2004/4

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AB - A new type of corn-shape carbon nanofibers (CCNFs) with metal-free tips was fabricated and their characteristics were investigated. The CCNFs were grown on Ni/SiO2/Si and Ni/Mo mesh substrates by a microwave plasma-enhanced chemical-vapor deposition method using CH4 and H2 gases with the technique of bias enhanced growth method. Transmission electron microscopy and selected area electron diffraction show that CCNFs were composed of thick cylindrical pure graphite walls, and had nanometer-sized tips with roots. The tips' apex angles of CCNFs were dependent on the substrate temperature, as the cone angles of 20, 39 and 60°.

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DO - 10.1016/j.diamond.2004.01.020

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