Successful optical MEMS and their applications

Renshi Sawada

Successful optical MEMS and their applications

Renshi Sawada

研究成果: 会議への寄与タイプ › 学会誌 › 査読

抄録

Optical MEMS is one of the most promising and successful targets of the application of MEMS technology, and various kinds of categories have been developing in this field. Some of the topics presented herein include analogue mirrors and sensors such as displacement sensors. As usual, packaging and bonding technologies are also hot topics. Other new topics discussed in this field include sensors in living biological tissue.

本文言語	英語
ページ	1603-1606
ページ数	4
出版ステータス	出版済み - 2010
イベント	17th International Display Workshops, IDW'10 - Fukuoka, 日本継続期間: 12月 1 2010 → 12月 3 2010

その他

その他	17th International Display Workshops, IDW'10
国/地域	日本
City	Fukuoka
Period	12/1/10 → 12/3/10

!!!All Science Journal Classification (ASJC) codes

コンピュータビジョンおよびパターン認識
人間とコンピュータの相互作用

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abstract = "Optical MEMS is one of the most promising and successful targets of the application of MEMS technology, and various kinds of categories have been developing in this field. Some of the topics presented herein include analogue mirrors and sensors such as displacement sensors. As usual, packaging and bonding technologies are also hot topics. Other new topics discussed in this field include sensors in living biological tissue.",

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AB - Optical MEMS is one of the most promising and successful targets of the application of MEMS technology, and various kinds of categories have been developing in this field. Some of the topics presented herein include analogue mirrors and sensors such as displacement sensors. As usual, packaging and bonding technologies are also hot topics. Other new topics discussed in this field include sensors in living biological tissue.

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T2 - 17th International Display Workshops, IDW'10

Y2 - 1 December 2010 through 3 December 2010

ER -

Successful optical MEMS and their applications

抄録

その他

!!!All Science Journal Classification (ASJC) codes

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