TY - GEN
T1 - Stable MEMS electrostatic comb-driven scanning mirror via feedback of comb electrostatic capacitance
AU - Ishikawa, Noriaki
AU - Okazaki, Koji
AU - Kudo, Ayumu
AU - Sawada, Renshi
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/9/13
Y1 - 2016/9/13
N2 - This paper reports a stable electrostatic comb-driven scanner detecting electrostatic capacitance between the comb-shaped electrodes of mirror and the detecting electrodes, and feeding it back to the drive signals applied to the driving electrodes.
AB - This paper reports a stable electrostatic comb-driven scanner detecting electrostatic capacitance between the comb-shaped electrodes of mirror and the detecting electrodes, and feeding it back to the drive signals applied to the driving electrodes.
UR - https://www.scopus.com/pages/publications/84990206503
UR - https://www.scopus.com/pages/publications/84990206503#tab=citedBy
U2 - 10.1109/OMN.2016.7565866
DO - 10.1109/OMN.2016.7565866
M3 - Conference contribution
AN - SCOPUS:84990206503
T3 - International Conference on Optical MEMS and Nanophotonics
BT - 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
PB - IEEE Computer Society
T2 - 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
Y2 - 31 July 2016 through 4 August 2016
ER -