TY - JOUR
T1 - Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties
AU - Chung, Wan Young
AU - Sakai, Go
AU - Shimanoe, Kengo
AU - Miura, Norio
AU - Lee, Duk Dong
AU - Yamazoe, Noboru
PY - 2000/6/30
Y1 - 2000/6/30
N2 - Thin films of indium oxide were prepared on alumina and silicon substrates by spin-coating from an aqueous acetic acid solution dissolving In(OH)3 and ammonium carboxymethyl cellulose. The films could cover well the large grains of rough alumina as well as the flat surface of silicon. By changing the number of spin-coating, the film thickness was well controlled between 70 nm and 210 nm on alumina or between 65 nm and 220 nm on silicon, as observed by cross-sectional FE-SEM. Gas sensing properties including sensitivity, selectivity and the rates of response and recovery were strongly dependent on the kind of substrate, film thickness and operating temperature.
AB - Thin films of indium oxide were prepared on alumina and silicon substrates by spin-coating from an aqueous acetic acid solution dissolving In(OH)3 and ammonium carboxymethyl cellulose. The films could cover well the large grains of rough alumina as well as the flat surface of silicon. By changing the number of spin-coating, the film thickness was well controlled between 70 nm and 210 nm on alumina or between 65 nm and 220 nm on silicon, as observed by cross-sectional FE-SEM. Gas sensing properties including sensitivity, selectivity and the rates of response and recovery were strongly dependent on the kind of substrate, film thickness and operating temperature.
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U2 - 10.1016/S0925-4005(99)00419-0
DO - 10.1016/S0925-4005(99)00419-0
M3 - Conference article
AN - SCOPUS:0034733270
SN - 0925-4005
VL - 65
SP - 312
EP - 315
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
IS - 1
T2 - IMCS-7: 7th International Meeting on Chemical Sensors
Y2 - 27 July 1998 through 30 July 1998
ER -