@inproceedings{401b9922cd514faca2cf5bac05fa83bd,
title = "Room-temperature vacuum packaging using ultrasonic bonding with Cu compliant rim",
abstract = "In this study, we demonstrate room-temperature vacuum sealing by combining Cu compliant rim with ultrasonic assist.",
author = "Ryo Takigawa and Hiroki Kawano and Takanori Shuto and Akihiro Ikeda and Takayuki Takao and Tanemasa Asano",
year = "2014",
doi = "10.1109/LTB-3D.2014.6886183",
language = "English",
isbn = "9781479952618",
series = "Proceedings of 2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2014",
publisher = "IEEE Computer Society",
pages = "44",
booktitle = "Proceedings of 2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2014",
address = "United States",
note = "2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2014 ; Conference date: 15-07-2014 Through 16-07-2014",
}