In this study, evaluation of precision in rotation stage and investigation of effect of rotation stage blurring on resolution are performed in imaging X-ray tomography set-up, which allows nano-scale observation, for the purpose of improving resolution in X-ray tomography. In the result of precision evaluation of rotation stage in high-resolution imaging X-ray tomography, fluctuation, which was approximately 35 nm in maximum and approximately 13 nm in average, was found. This fluctuation was under 1 pixel. In the simulation that analyzed effect of fluctuation in rotation stage, it was found that long periodic fluctuation deteriorate reconstructed image terribly. But, impulse-like fluctuation does not almost affect reconstructed image quality. However, reconstructed image is deteriorated when the frequency of impulse-like fluctuation increase. If long periodic fluctuation, which was observed in the precision evaluation, is corrected, the resolution improvement was confirmed though the fluctuation was less than 1 pixel.
|ジャーナル||Keikinzoku/Journal of Japan Institute of Light Metals|
|出版ステータス||出版済み - 2013|
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