@inproceedings{068682d1de054a36b411dc28049e0e8c,
title = "Progress with MEMS X-ray micro pore optics",
abstract = "Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.",
keywords = "MEMS, Micro pore optics, X-ray telescope",
author = "Yuichiro Ezoea and Teppei Moriyama and Tomohiro Ogawa and Takuya Kakiuchi and Takaya Ohashi and Ikuyuki Mitsuishi and Kazuhisa Mitsuda and Mitsuhiro Horade and Susumu Sugiyama and Riveros, \{Raul E.\} and Hitomi Yamaguchi and Yoshiaki Kanamori and Kohei Morishita and Kazuo Nakajima and Ryutaro Maeda",
year = "2012",
doi = "10.1117/12.925811",
language = "English",
isbn = "9780819491442",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
booktitle = "Space Telescopes and Instrumentation 2012",
address = "United States",
note = "Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray ; Conference date: 01-07-2012 Through 06-07-2012",
}