TY - GEN
T1 - Progress with MEMS X-ray micro pore optics
AU - Ezoea, Yuichiro
AU - Moriyama, Teppei
AU - Ogawa, Tomohiro
AU - Kakiuchi, Takuya
AU - Ohashi, Takaya
AU - Mitsuishi, Ikuyuki
AU - Mitsuda, Kazuhisa
AU - Horade, Mitsuhiro
AU - Sugiyama, Susumu
AU - Riveros, Raul E.
AU - Yamaguchi, Hitomi
AU - Kanamori, Yoshiaki
AU - Morishita, Kohei
AU - Nakajima, Kazuo
AU - Maeda, Ryutaro
PY - 2012
Y1 - 2012
N2 - Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.
AB - Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.
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UR - http://www.scopus.com/inward/citedby.url?scp=84871749314&partnerID=8YFLogxK
U2 - 10.1117/12.925811
DO - 10.1117/12.925811
M3 - Conference contribution
AN - SCOPUS:84871749314
SN - 9780819491442
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Space Telescopes and Instrumentation 2012
T2 - Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray
Y2 - 1 July 2012 through 6 July 2012
ER -