TY - GEN
T1 - Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source
AU - Tamaru, Koji
AU - Nakamura, Daisuke
AU - Takahashi, Akihiro
AU - Okada, Tatsuo
PY - 2007
Y1 - 2007
N2 - A new metal droplet generator is proposed and tested. In this study, Sn droplets are generated for an laser-produced plasma extreme-ultraviolet light source at 13.5 nm that is used in the next generation optical lithography system. The droplet generator can produce Sn droplets as small as 15 μm on demand.
AB - A new metal droplet generator is proposed and tested. In this study, Sn droplets are generated for an laser-produced plasma extreme-ultraviolet light source at 13.5 nm that is used in the next generation optical lithography system. The droplet generator can produce Sn droplets as small as 15 μm on demand.
UR - http://www.scopus.com/inward/record.url?scp=84899069652&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84899069652&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84899069652
SN - 1424411742
SN - 9781424411740
T3 - Optics InfoBase Conference Papers
BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
PB - Optical Society of America
T2 - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
Y2 - 26 August 2007 through 26 August 2007
ER -