Production of low-electron-temperature electron cyclotron resonance plasma using nitrogen gas in the mirror magnetic field

Naho Itagaki, Yoko Ueda, Nobuo Ishii, Yoshinobu Kawai

研究成果: ジャーナルへの寄稿学術誌査読

9 被引用数 (Scopus)

抄録

An electron cyclotron resonance (ECR) plasma with a low electron temperature (< 2eV) and high electron density (∼ 1012 cm-3) was realized in a mirror magnetic field for Ar/N2 or N2 gas. It was found based on the particle and power balance that the decrease in the electron temperature was due to the magnetic-mirror confinement depending on the collision cross section between electrons and neutral particles. The experimental and numerical results suggest that diluting with N2 gas, whose excitation cross section peaks at a low electron energy of about 2 eV, in the mirror magnetic field enables us to reduce the electron temperature efficiently in an ECR plasma.

本文言語英語
ページ(範囲)2489-2494
ページ数6
ジャーナルJapanese Journal of Applied Physics
40
4 A
DOI
出版ステータス出版済み - 4月 2001

!!!All Science Journal Classification (ASJC) codes

  • 工学一般
  • 物理学および天文学一般

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