抄録
With respect to the manufacturing of optical elements, facile and effective fabrication method is proposed. It is developed in connection with photo-induced surface relief (PSR) formation phenomenon that occurs on the azobenzene functionalized polymer film. Purely optically inscribed surface relief structures have been used as a plastic mold for manufacturing of its replica. At least a hundred times replication process has been achieved using thermosetting resin without any deterioration. This method has many merits not only from a technical viewpoint but also from a economical efficiency. In this report, first the PSR phenomenon is explained and then several examples for optical component fabrication are demonstrated. photo-induced surface relief (PSR), azobenzene polymer film, optical patterning, polymer mold (template), replication, thermosetting resin, UV curable resin, optical elements, kinoform, laser pattern generator.
本文言語 | 英語 |
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ページ(範囲) | 155-162 |
ページ数 | 8 |
ジャーナル | Proceedings of SPIE - The International Society for Optical Engineering |
巻 | 5183 |
DOI | |
出版ステータス | 出版済み - 2003 |
外部発表 | はい |
イベント | Lithographic and Micromachining Techniques for Optical Component Fabrication II - San Diego, CA, 米国 継続期間: 8月 3 2003 → 8月 4 2003 |
!!!All Science Journal Classification (ASJC) codes
- 電子材料、光学材料、および磁性材料
- 凝縮系物理学
- コンピュータ サイエンスの応用
- 応用数学
- 電子工学および電気工学