On-chip coil integrated superconducting tunnel junction (OC2-STJ) has been demonstrated for high performance X-ray detector. The STJ was fabricated by an improved fabrication technique based on a high quality Nb/Al/AlOx/Nb junction technology. The STJ shows high quality current-voltage characteristics with an ultra-low leakage current of a few nA at 0.4 K for 100 μm × 100 μm junction. Typical critical current of the coil was achieved more than 50 mA for 2 μm line width, which can generate a magnetic field of about 10 mT into the STJ. It was found that the OC2-STJ successfully responded to the irradiated 5.9 keV X-ray.
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