抄録
Electron energy distribution functions in low-pressure capacitively coupled radio-frequency argon discharges were measured using the technique of laser Thomson scattering. It was found that the distribution functions changed from a bi-Maxwellian at lower pressures to a single Maxwellian at higher pressures. These measurements provide independent confirmation of probe measurements made in similar discharges. The electron temperature and density of the cold group of electrons were measured with an accuracy of better than 10%.
本文言語 | 英語 |
---|---|
ページ(範囲) | 3187-3189 |
ページ数 | 3 |
ジャーナル | Applied Physics Letters |
巻 | 78 |
号 | 21 |
DOI | |
出版ステータス | 出版済み - 5月 21 2001 |
!!!All Science Journal Classification (ASJC) codes
- 物理学および天文学(その他)