Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering

M. A.Mansour Elsabbagh, M. D. Bowden, K. Uchino, K. Muraoka

研究成果: ジャーナルへの寄稿学術誌査読

13 被引用数 (Scopus)

抄録

Electron energy distribution functions in low-pressure capacitively coupled radio-frequency argon discharges were measured using the technique of laser Thomson scattering. It was found that the distribution functions changed from a bi-Maxwellian at lower pressures to a single Maxwellian at higher pressures. These measurements provide independent confirmation of probe measurements made in similar discharges. The electron temperature and density of the cold group of electrons were measured with an accuracy of better than 10%.

本文言語英語
ページ(範囲)3187-3189
ページ数3
ジャーナルApplied Physics Letters
78
21
DOI
出版ステータス出版済み - 5月 21 2001

!!!All Science Journal Classification (ASJC) codes

  • 物理学および天文学(その他)

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