TY - GEN
T1 - NUCLEATION IN THIN FILM PROCESSING
AU - Hijikata, Kunio
AU - Miyazaki, Koji
AU - Inoue, Takayoshi
AU - Nakabeppu, Osamu
N1 - Publisher Copyright:
© 1996 American Society of Mechanical Engineers (ASME). All rights reserved.
PY - 1996
Y1 - 1996
N2 - In this study, the stability of a very thin film at the initial stage of deposition was investigated using perturbation theory. It is assumed that the critical wave length of perturbation on a continuous thin film corresponds to the nuclei diameter and we also propose that the surface tension of a thin film changes with the film thickness. With these assumptions, it can be shown that the nucleus diameter grows linearly with deposition time. It is interesting to note that the resulting equation is similar to the well-known contact angle equation. To confirm the result of the analysis, a vacuum deposition experiment was conducted. Copper nuclei on the substrate were observed using a transmission electron microscope(TEM) and diameters of island nuclei were measured. The results clearly show that the effective nuclei diameter grows linearly with deposition time. The good agreement between analysis and the experiment suggests the validity of this analysis.
AB - In this study, the stability of a very thin film at the initial stage of deposition was investigated using perturbation theory. It is assumed that the critical wave length of perturbation on a continuous thin film corresponds to the nuclei diameter and we also propose that the surface tension of a thin film changes with the film thickness. With these assumptions, it can be shown that the nucleus diameter grows linearly with deposition time. It is interesting to note that the resulting equation is similar to the well-known contact angle equation. To confirm the result of the analysis, a vacuum deposition experiment was conducted. Copper nuclei on the substrate were observed using a transmission electron microscope(TEM) and diameters of island nuclei were measured. The results clearly show that the effective nuclei diameter grows linearly with deposition time. The good agreement between analysis and the experiment suggests the validity of this analysis.
UR - https://www.scopus.com/pages/publications/85169599179
UR - https://www.scopus.com/pages/publications/85169599179#tab=citedBy
U2 - 10.1115/IMECE1996-1039
DO - 10.1115/IMECE1996-1039
M3 - Conference contribution
AN - SCOPUS:85169599179
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 137
EP - 142
BT - Transport Phenomena in Materials Processing and Manufacturing
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996
Y2 - 17 November 1996 through 22 November 1996
ER -