Novel contact probing method using single fiber optical trapping probe

Sang In Eom, Yasuhiro Takaya, Terutake Hayashi

研究成果: ジャーナルへの寄稿学術誌査読

19 被引用数 (Scopus)

抄録

A novel contact probing method for microdevices with high aspect ratio or biological samples is proposed. In this technique, a dielectric microsphere is optically trapped by an optical fiber and used as a touch probe. In the simulations, the finite difference time domain (FDTD) method and Maxwell stress theory are applied to obtain a suitable shape for the tip of the optical fiber. The results show that it is possible to trap the microsphere by using a single optical fiber. In experiments, single fiber optical trapping is successfully demonstrated by considering the simulation results. In order to use the trapped microsphere in the touch probe, the intensity of the reentered beam that is reflected from the surface of the microsphere is monitored. When the probe is in contact with the surface of the object, the intensity of the beam changes and this change is used as the contact signal. Because the probe is trapped optically and the trapping force is very small, this system can be used in a low invasive method.

本文言語英語
ページ(範囲)235-242
ページ数8
ジャーナルPrecision Engineering
33
3
DOI
出版ステータス出版済み - 7月 2009
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 工学一般

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