New planar lightwave circuit (PLC) platform eliminating Si terraces and its application to opto-electronic hybrid integrated modules

Takashi Yamada, Toshikazu Hashimoto, Takaharu Ohyama, Yuji Akahori, Akimasa Kaneko, Kazutoshi Kato, Ryouichi Kasahara, Mikitaka Ito

研究成果: ジャーナルへの寄稿学術誌査読

11 被引用数 (Scopus)

抄録

We have developed a new planar lightwave circuit (PLC) platform eliminating Si terraces for hybrid integrated optical modules. This PLC platform has the advantage of a lower fabrication cost than the conventional PLC platform with an Si terrace, because it does not require fabrication processes such as Si terrace forming and mechanical polishing. Using our new PLC platform structure, we fabricated a transceiver for optical access networks and an 8-channel multichannel photoreceiver for wavelength division multiplexing (WDM) interconnection systems.

本文言語英語
ページ(範囲)685-692
ページ数8
ジャーナルIEICE Transactions on Electronics
E84-C
5
出版ステータス出版済み - 5月 2001
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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