Nanometer-scale surface analysis by laser-ablation fluorescence spectroscopy

Yuji Oki, Mitsuo Maeda, Akira Hirano

研究成果: ジャーナルへの寄稿会議記事査読

1 被引用数 (Scopus)


This report demonstrates a very low absolute direction limit in Na atoms less than 1 fg with the LAA F spectroscopy. Applying this technique, a solid target of a strong LAA F signal for the ablation of 9 nm thickness is attained. It can be expected that the measurement of the density distribution of a specified element with a spatial resolution is less than 1 μm.

ジャーナルConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
出版ステータス出版済み - 1996
イベントProceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96 - Anaheim, CA, USA
継続期間: 6月 2 19966月 7 1996

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学


「Nanometer-scale surface analysis by laser-ablation fluorescence spectroscopy」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。