@inproceedings{914e999ba5714c5284cb2476b50ff1f1,
title = "Nano-inkjet and its application to metal-induced crystallization of a-Si for poy-Si TFTs",
abstract = "This paper reviews electro-static inkjet and its application to location controlled growth of poly-crystalline Si grains for thin-film transistor application. The electro-static inkjet using a needle head enables us to draw dot patterns whose dimension is in the deep submicron region. Ejection of a Ni-nanoparticle solution using the head to the surface of a-Si produces single-grains at the printed sites as was demonstrated by Ni nano-imprint technology.",
author = "Tanemasa Asano and Yuji Ishida",
year = "2010",
doi = "10.1149/1.3481229",
language = "English",
isbn = "9781566778244",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "5",
pages = "149--156",
booktitle = "Thin Film Transistors 10, TFT 10",
edition = "5",
}