Microstructure and Its Heat Treatment Process of Thin Films Fabricated by Alternate Sputtering of (Bi,Pb)₂Sr₂CaCu₂O_xand Pb-Ca-Cu-O Targets on SrTiO₃Substrates

For obtaining microscopic knowledge toward a fabrication process of (Bi,Pb)2Sr2Ca2Cu3Ox (Bi,Pb-2223) single-phase material, we fabricated a multilayered film on a SrTiO3(001) substrate by a sputtering method using (Bi,Pb)2Sr2CaCu2Oy (Bi,Pb-2212) and Pb-Ca-Cu-O targets alternately at 650 °C. The as-grown film was an epitaxially grown multilayered film consisting of Bi,Pb-2212 and Pb-Ca-Cu-O layers. Coarse grains of impurity phases were also formed within the multilayered film, and these impurity phases were difficult to eliminate even after heat treatments. After 10 h heat treatment at 840 °C with Bi,Pb-2223 pellets, the phase transition from Bi,Pb-2212 to Bi,Pb-2223 occurred in the multilayered film. The phase transition to Bi,Pb-2223 proceeded preferentially at the interface with the impurity phases and the Pb-Ca-Cu-O layers. These observation results suggest that the impurity phases promote three-dimensional atomic diffusion in the multilayered film to accelerate the phase transition to Bi,Pb-2223, as well as consume constituent elements, Ca, Cu and O. Even after the 100 h heat treatment at 840 °C with Bi,Pb-2223 pellets, the phase transition from Bi,Pb-2212 to Bi,Pb-2223 did not proceed completely, and the fraction of the Bi,Pb-2223 phase in the whole superconducting phases was ∼50%. It is suggested that controlling the formation and microstructure of the impurity phases is a key to further increasing the fraction of the Bi,Pb-2223 phase.