Microplasma generated at solid-solid interface and its application to nanostructure formation

D. Nakamura, J. Nishimura, T. Okada

研究成果: ジャーナルへの寄稿学術誌査読

抄録

The dynamics of the microplasmas created at a transparent solid-solid interface were investigated extensively. Microplasmas were generated at an interface between a carbon (C) or a germanium (Ge) target and a SiO2 substrate by irradiating a KrF excimer laser beam onto the target, and the dynamics of the plasmas were investigated with the aid of optical emission spectroscopy. Although the emission spectra that contained the characteristic emission lines and the absorption bands originated from C and Ge species were observed from the C and Ge plasmas without the SiO2 substrate, identical spectra were obtained from both the plasmas created at the C-SiO 2 and Ge-SiO2 interfaces. Furthermore, the target and the Si substrate surfaces were examined with a scanning electron microscope. The SiO2 substrate was smoothly etched and a nanostructure of a chain-like morphology was also observed in the deposits on the SiO2 substrate.

本文言語英語
ページ(範囲)813-816
ページ数4
ジャーナルApplied Physics A: Materials Science and Processing
92
4
DOI
出版ステータス出版済み - 9月 2008

!!!All Science Journal Classification (ASJC) codes

  • 化学一般
  • 材料科学一般

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