TY - GEN
T1 - MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation
AU - Ezoe, Yuichiro
AU - Ogawa, Tomohiro
AU - Ikuta, Masahiro
AU - Sato, Mayu
AU - Mitsuda, Kazuhisa
AU - Yamaguchi, Hitomi
AU - Kanamori, Yoshiaki
AU - Morishita, Kohei
AU - Nakajima, Kazuo
AU - Hiroshima, Hiroshi
AU - Maeda, Ryutaro
N1 - Publisher Copyright:
© 2014 University of Strathclyde.
PY - 2014/10/14
Y1 - 2014/10/14
N2 - We have been developing novel ultra lightweight X-ray optics based on MEMS technologies, aiming at future space missions whose objectives include X-ray astronomy, planetary exploration, and Earth observation. Sidewalls of DRIE- micro pores through thin silicon wafers are used for X-ray mirrors. Recently, we built a prototype of a 4-inch Wolter type-I optic and fabricated a 12-inch single-stage op-tic. In this paper, we review our development and future space applications.
AB - We have been developing novel ultra lightweight X-ray optics based on MEMS technologies, aiming at future space missions whose objectives include X-ray astronomy, planetary exploration, and Earth observation. Sidewalls of DRIE- micro pores through thin silicon wafers are used for X-ray mirrors. Recently, we built a prototype of a 4-inch Wolter type-I optic and fabricated a 12-inch single-stage op-tic. In this paper, we review our development and future space applications.
UR - http://www.scopus.com/inward/record.url?scp=84908046805&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84908046805&partnerID=8YFLogxK
U2 - 10.1109/OMN.2014.6924553
DO - 10.1109/OMN.2014.6924553
M3 - Conference contribution
AN - SCOPUS:84908046805
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 127
EP - 128
BT - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PB - IEEE Computer Society
T2 - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Y2 - 17 August 2014 through 21 August 2014
ER -