Level-energy-dependent mean velocities of excited tungsten atoms sputtered by krypton-ion bombardment

Keisuke Nogami; Yasuhiro Sakai; Shota Mineta; Daiji Kato; Izumi Murakami; Hiroyuki A. Sakaue; Takahiro Kenmotsu; Kenji Furuya; Kenji Motohashi

doi:10.1116/1.4928250

Level-energy-dependent mean velocities of excited tungsten atoms sputtered by krypton-ion bombardment

Keisuke Nogami, Yasuhiro Sakai, Shota Mineta, Daiji Kato, Izumi Murakami, Hiroyuki A. Sakaue, Takahiro Kenmotsu, Kenji Furuya, Kenji Motohashi

自然科学実験系部門

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

3 被引用数 (Scopus)

抄録

Visible emission spectra were acquired from neutral atoms sputtered by 35-60 keV Kr⁺ ions from a polycrystalline tungsten surface. Mean velocities of excited tungsten atoms in seven different 6p states were also obtained via the dependence of photon intensities on the distance from the surface. The average velocities parallel to the surface normal varied by factors of 2-4 for atoms in the different 6p energy levels. However, they were almost independent of the incident ion kinetic energy. The 6p-level energy dependence indicated that the velocities of the excited atoms were determined by inelastic processes that involve resonant charge exchange.

本文言語	英語
論文番号	061602
ジャーナル	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
巻	33
号	6
DOI	https://doi.org/10.1116/1.4928250
出版ステータス	出版済み - 11月 1 2015

!!!All Science Journal Classification (ASJC) codes

凝縮系物理学
表面および界面
表面、皮膜および薄膜

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title = "Level-energy-dependent mean velocities of excited tungsten atoms sputtered by krypton-ion bombardment",

abstract = "Visible emission spectra were acquired from neutral atoms sputtered by 35-60 keV Kr+ ions from a polycrystalline tungsten surface. Mean velocities of excited tungsten atoms in seven different 6p states were also obtained via the dependence of photon intensities on the distance from the surface. The average velocities parallel to the surface normal varied by factors of 2-4 for atoms in the different 6p energy levels. However, they were almost independent of the incident ion kinetic energy. The 6p-level energy dependence indicated that the velocities of the excited atoms were determined by inelastic processes that involve resonant charge exchange.",

author = "Keisuke Nogami and Yasuhiro Sakai and Shota Mineta and Daiji Kato and Izumi Murakami and Sakaue, {Hiroyuki A.} and Takahiro Kenmotsu and Kenji Furuya and Kenji Motohashi",

note = "Publisher Copyright: {\textcopyright} 2015 American Vacuum Society.",

year = "2015",

month = nov,

day = "1",

doi = "10.1116/1.4928250",

language = "English",

volume = "33",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

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TY - JOUR

T1 - Level-energy-dependent mean velocities of excited tungsten atoms sputtered by krypton-ion bombardment

AU - Nogami, Keisuke

AU - Sakai, Yasuhiro

AU - Mineta, Shota

AU - Kato, Daiji

AU - Murakami, Izumi

AU - Sakaue, Hiroyuki A.

AU - Kenmotsu, Takahiro

AU - Furuya, Kenji

AU - Motohashi, Kenji

PY - 2015/11/1

Y1 - 2015/11/1

N2 - Visible emission spectra were acquired from neutral atoms sputtered by 35-60 keV Kr+ ions from a polycrystalline tungsten surface. Mean velocities of excited tungsten atoms in seven different 6p states were also obtained via the dependence of photon intensities on the distance from the surface. The average velocities parallel to the surface normal varied by factors of 2-4 for atoms in the different 6p energy levels. However, they were almost independent of the incident ion kinetic energy. The 6p-level energy dependence indicated that the velocities of the excited atoms were determined by inelastic processes that involve resonant charge exchange.

AB - Visible emission spectra were acquired from neutral atoms sputtered by 35-60 keV Kr+ ions from a polycrystalline tungsten surface. Mean velocities of excited tungsten atoms in seven different 6p states were also obtained via the dependence of photon intensities on the distance from the surface. The average velocities parallel to the surface normal varied by factors of 2-4 for atoms in the different 6p energy levels. However, they were almost independent of the incident ion kinetic energy. The 6p-level energy dependence indicated that the velocities of the excited atoms were determined by inelastic processes that involve resonant charge exchange.

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DO - 10.1116/1.4928250

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JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 6

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ER -

Level-energy-dependent mean velocities of excited tungsten atoms sputtered by krypton-ion bombardment

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!!!All Science Journal Classification (ASJC) codes

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