TY - GEN
T1 - Integrated molecule recognition sensor electronics using nanostructured metal oxides on silicon
AU - Yanagida, Takeshi
PY - 2018/7/3
Y1 - 2018/7/3
N2 - Electrical sensing of volatile molecular species in environments and/or from our bodies by using mobile electronics is an important issue for future electronic devices. This is because these sensor electronics will have an impact on our daily life and healthcare via collecting and analyzing data. Among various sensor materials, 'Metal Oxides' is one of the most abundant and robust materials in ambient atmosphere. However, metal oxide sensors have several essential difficulties when applying to CMOS sensor electronics. Here I show our recent progress as to integrated molecule recognition sensors by utilizing nano-metal oxides [1-3] on silicon.
AB - Electrical sensing of volatile molecular species in environments and/or from our bodies by using mobile electronics is an important issue for future electronic devices. This is because these sensor electronics will have an impact on our daily life and healthcare via collecting and analyzing data. Among various sensor materials, 'Metal Oxides' is one of the most abundant and robust materials in ambient atmosphere. However, metal oxide sensors have several essential difficulties when applying to CMOS sensor electronics. Here I show our recent progress as to integrated molecule recognition sensors by utilizing nano-metal oxides [1-3] on silicon.
UR - http://www.scopus.com/inward/record.url?scp=85050455792&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85050455792&partnerID=8YFLogxK
U2 - 10.1109/VLSI-TSA.2018.8403827
DO - 10.1109/VLSI-TSA.2018.8403827
M3 - Conference contribution
AN - SCOPUS:85050455792
T3 - 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018
SP - 1
EP - 2
BT - 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018
Y2 - 16 April 2018 through 19 April 2018
ER -