Inkjet printing of nickel nanosized particles for metal-induced crystallization of amorphous silicon

Yuji Ishida, Gou Nakagawa, Tanemasa Asano

研究成果: ジャーナルへの寄稿学術誌査読

15 被引用数 (Scopus)

抄録

We demonstrated for the first time single-crystal grain growth in the solid-phase crystallization of amorphous silicon (a-Si) film induced by inkjet-printed colloidal solution containing Ni nanosized particles. The electrostatic inkjet nozzle with a needle can print dots of Ni colloidal solution, whose size ranges from submicron order to a few ten micrometers, on the a-Si film surface by controlling the needle apex radius and the number of applied voltage pulses. The dependence of the crystallization behavior of a-Si on dot size is investigated by electron backscattering pattern (EBSP) analysis. Crystallization behavior is categorized into three modes: single-crystal growth, polycrystal growth, and lateral-crystal growth. Statistical analysis suggests that, when the dot size is 0.86 μm in diameter, a single-crystal grain is grown at the inkjet-printed sites with a probability of 0.62.

本文言語英語
ページ(範囲)6437-6443
ページ数7
ジャーナルJapanese Journal of Applied Physics
46
9 B
DOI
出版ステータス出版済み - 9月 20 2007

!!!All Science Journal Classification (ASJC) codes

  • 工学一般
  • 物理学および天文学一般

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