Influence of substrate type on surface structure of polymeric perfluorocarbon in the initial stage of deposition in Ar/c-C4F8 plasmas

Kenji Furuya; Ryoichi Nakanishi; Hiroshi Okumura; Makoto Makita; Akira Harata

doi:10.1016/j.tsf.2007.10.112

Influence of substrate type on surface structure of polymeric perfluorocarbon in the initial stage of deposition in Ar/c-C₄F₈ plasmas

Kenji Furuya
, Ryoichi Nakanishi
, Hiroshi Okumura
, Makoto Makita
, Akira Harata

自然科学実験系部門

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

11 被引用数 (Scopus)

抄録

Polymeric perfluorocarbon was deposited on the Si, Ag and Al substrates in Ar/c-C₄F₈ plasmas under a deposition rate of 10 nm/h for seven hours. The X-ray photoelectron spectra and atomic force microscope images of the deposited materials were observed. As a result, it has been found that the surface structure and chemical bonding of the deposited materials are remarkably different from each other, depending on the kind of substrate.

本文言語	英語
ページ（範囲）	6028-6032
ページ数	5
ジャーナル	Thin Solid Films
巻	516
号	18
DOI	https://doi.org/10.1016/j.tsf.2007.10.112
出版ステータス	出版済み - 7月 31 2008

!!!All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
表面および界面
表面、皮膜および薄膜
金属および合金
材料化学

文献へのアクセス

10.1016/j.tsf.2007.10.112

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引用スタイル

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AU - Harata, Akira

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