Heterogeneously integrated laser-induced fluorescence detection devices: Integration of an excitation source

We have proposed and developed a fluorescence detector in which a thick SiO₂/Ta 2O5 multilayer optical interference filter is monolithically integrated on a hydrogenated amorphous silicon (a-Si:H) PIN photodiode. Combined with the optical transparency of the detector's glass substrate, the annular shape of the detector will enable us to construct a module containing a detector and an excitation source. Based on a detection platform that comprises a fluorescence-collecting microlens and an annular fluorescence detector while using an external laser source, we have demonstrated single molecule DNA detection capability when combined with a polymerase chain reaction (PCR). We also describe our work towards the integration of an excitation source to fabricate a heterogeneously-integrated laser-induced fluorescence detection (LIF) device comprising a laser diode, micro-lenses and the integrated a-Si:H fluorescence detector.