Growth of DLC thin films in hydrogen atmosphere by pulsed laser ablation of a PMMA target

T. Yoshitake, T. Nishiyama, K. Nagayama

    研究成果: ジャーナルへの寄稿学術誌査読

    4 被引用数 (Scopus)

    抄録

    Diamond-like carbon (DLC) films with thickness of 100 nm were deposited on glass and silicon substrates at temperatures of 20 °C by pulsed laser deposition (PLD) using a polymethyl methacrylate (PMMA) target. The abundant sp3 bonding was made possible because the species ejected from the PMMA target by laser ablation were dissociated into atomic species and atomic hydrogen, thus generating an sp2 etching effect. The sp2 bonding fraction increased due to the additional sp2 etching effect of the atomic hydrogen dissociated from the ambient hydrogen at pressure higher than 10 m Torr.

    本文言語英語
    ページ(範囲)489-490
    ページ数2
    ジャーナルJournal of Materials Science Letters
    19
    6
    DOI
    出版ステータス出版済み - 2000

    !!!All Science Journal Classification (ASJC) codes

    • 材料科学一般

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