Formation process of Si3N4 particles on surface of Si ingots grown using silica crucibles with Si3N4 coating by noncontact crucible method
Kazuo Nakajima, Kohei Morishita, Ryota Murai, Noritaka Usami
研究成果: ジャーナルへの寄稿 › 学術誌 › 査読
19
被引用数
(Scopus)