First X-ray imaging with a micromachined Wolter type-I telescope

Tomohiro Ogawa, Yuichiro Ezoe, Takuya Kakiuchi, Masahiro Ikuta, Mayu Sato, Kasumi Nakamura, Masaki Numazawa, Kazuma Takeuchi, Masaru Terada, Takaya Ohashi, Ikuyuki Mitsuishi, Kumi Ishikawa, Kazuhisa Mitsuda, Kohei Morishita, Kazuo Nakajima

研究成果: ジャーナルへの寄稿学術誌査読

10 被引用数 (Scopus)


A light-weight Wolter type-I telescope for future space X-ray observations is prototyped by using micromachining technologies. Curvilinear micro pores with a width of 20 μ m are fabricated with deep reactive ion etching. Sidewalls of the pores are smoothed with high temperature annealing. Then, two wafers are deformed to different curvature radii, 1000 and 333 mm. The two wafers are aligned using parallel X-ray beams which are dominated by Al-Kα line at 1.49 keV. High angular and positional accuracies of the order of arcsec and μ m are achieved using movable stages. The first clear X-ray focusing is confirmed. Its angular resolution is 4.1 arcmin in full width half maximum while it is at least 92 arcmin in half power width. The effective area is 19.0 mm2 which is ∼ 5 times smaller than a model calculation. We discuss causes of the degraded angular resolution and effective area and also future improvements.

ジャーナルMicrosystem Technologies
出版ステータス出版済み - 4月 1 2017

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学


「First X-ray imaging with a micromachined Wolter type-I telescope」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。