TY - JOUR
T1 - Fe gettering by p+ layer in bifacial Si solar cell fabrication
AU - Terakawa, T.
AU - Wang, D.
AU - Nakashima, H.
PY - 2006/4/1
Y1 - 2006/4/1
N2 - Gettering behaviors of Fe into solar cell grade Si are investigated by deep level transient spectroscopy. The samples contaminated with Fe in the range of the concentration of 1.5×1012-2.0×10 14 cm-3 were annealed at 600 °C to induce gettering. It is shown that the surface layer gettering behaviors of Fe for the sample without p+ layer strongly depend on the Fe contamination level, in which the surface layer gettering is not effective for the sample with low level contamination <1×1013 cm-3 but effective for the sample with middle level contamination of 1-5×1013 cm-3. In contrast, the samples with p+ layer show effective gettering for low and middle level contaminations. The gettering mechanisms in solar cell grade Si without and with p+ layer are discussed in details.
AB - Gettering behaviors of Fe into solar cell grade Si are investigated by deep level transient spectroscopy. The samples contaminated with Fe in the range of the concentration of 1.5×1012-2.0×10 14 cm-3 were annealed at 600 °C to induce gettering. It is shown that the surface layer gettering behaviors of Fe for the sample without p+ layer strongly depend on the Fe contamination level, in which the surface layer gettering is not effective for the sample with low level contamination <1×1013 cm-3 but effective for the sample with middle level contamination of 1-5×1013 cm-3. In contrast, the samples with p+ layer show effective gettering for low and middle level contaminations. The gettering mechanisms in solar cell grade Si without and with p+ layer are discussed in details.
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U2 - 10.1016/j.physb.2005.12.061
DO - 10.1016/j.physb.2005.12.061
M3 - Conference article
AN - SCOPUS:33645145828
SN - 0921-4526
VL - 376-377
SP - 231
EP - 235
JO - Physica B: Condensed Matter
JF - Physica B: Condensed Matter
IS - 1
T2 - Proceedings of the 23rd International Conference on Defects in Semiconductors
Y2 - 24 July 2005 through 29 July 2005
ER -