Fe gettering by p+ layer in bifacial Si solar cell fabrication

T. Terakawa, D. Wang, H. Nakashima

研究成果: ジャーナルへの寄稿会議記事査読

1 被引用数 (Scopus)

抄録

Gettering behaviors of Fe into solar cell grade Si are investigated by deep level transient spectroscopy. The samples contaminated with Fe in the range of the concentration of 1.5×1012-2.0×10 14 cm-3 were annealed at 600 °C to induce gettering. It is shown that the surface layer gettering behaviors of Fe for the sample without p+ layer strongly depend on the Fe contamination level, in which the surface layer gettering is not effective for the sample with low level contamination <1×1013 cm-3 but effective for the sample with middle level contamination of 1-5×1013 cm-3. In contrast, the samples with p+ layer show effective gettering for low and middle level contaminations. The gettering mechanisms in solar cell grade Si without and with p+ layer are discussed in details.

本文言語英語
ページ(範囲)231-235
ページ数5
ジャーナルPhysica B: Condensed Matter
376-377
1
DOI
出版ステータス出版済み - 4月 1 2006
イベントProceedings of the 23rd International Conference on Defects in Semiconductors -
継続期間: 7月 24 20057月 29 2005

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 電子工学および電気工学

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