Fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions for radiation detection

H. Nakagawa, K. Joosse, H. Akoh, M. Aoyagi, S. Takada, K. Maehata, K. Ishibashi

研究成果: ジャーナルへの寄稿学術誌査読

抄録

A fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions (STJs) for radiation detection is presented. The fabrication process includes a MgO thin film, an underlayer method, a control of critical current, a nitrogen plasma passivation and a SiO2 insulator. Subgap current characteristics of STJs have been investigated and compared with conventional STJs in the temperature range of 0.35K to 4.2K in order to evaluate the junction quality for radiation detection. The STJs made by present process showed extremely high quality junction characteristics of a subgap current density of 0.1pA/μm, a resistance ratio Rd/Rn of 6 × 106 for 200 × 200μm2 STJ with a critical current density of 200A/cm2.

本文言語英語
ページ(範囲)17-23
ページ数7
ジャーナルDenshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory
61
6-7
出版ステータス出版済み - 1997

!!!All Science Journal Classification (ASJC) codes

  • 凝縮系物理学
  • 電子工学および電気工学

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