To gain a better understanding of the function of soft-material thin films, one should investigate the multiscale structural information from the surface roughness down to the atomically truncated structures at microarea. To achieve such an integrated investigation, a new experimental system has been launched by coupling with the measurement techniques, which include grazing incidence small/wide-angle X-ray scattering (GISWAXS) and grazing incidence X-ray diffraction (GIXD), as well as X-ray reflectivity (XR), at the BL03XU beamline of SPring-8. The high brilliance and low divergence beam allows the surface and interface structure measurements from the angstrom to the micrometer scale using a soller-slit system for proper optimization of measurement precision. A typical structural analysis of the soft-material film was performed to evaluate the practical performance and specifications of the experimental system.
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