Evaluation of Crystal Orientation for (K,Na)NbO3 Films Using X-ray Diffraction Reciprocal Space map and relationship between crystal orientation and piezoelectric coefficient

Kenji Shibata, Kazufumi Suenaga, Kazutoshi Watanabe, Fumimasa Horikiri, Tomoyoshi Mishima, Masaharu Shiratani

研究成果: ジャーナルへの寄稿学術誌査読

5 被引用数 (Scopus)

抄録

We have found an effective method for the evaluation of the crystal orientation of (K,Na)NbO3 (KNN) films in the (K,Na)NbO 3/Pt/T i/SiO 2/Si structure using X-ray diffraction (XRD) reciprocal space maps. Previously, the crystal structure and orientation of such (K,Na)NbO3 films were evaluated using 2θ=θ XRD, and were considered to be the pseudocubic perovskite structure with preferential (001) orientation and no (111) orientation. Here, we applied the new method using XRD reciprocal space maps, and discovered that the (K,Na)NbO3 films had some degree of KNN(111) orientation. We calculated the KNN(001)- and KNN(111)-orientation volume fractions for the (K,Na)NbO3 films from the (101) diffraction peaks originating from the KNN(001)- and KNN(111)-orientation elements in the XRD reciprocal space maps, considering the calibration factors obtained from pole-figure simulations, and examined the relationship between the crystal orientation and d31 piezoelectric coefficient in the (K,Na)NbO 3 films. The results indicated that the d31 piezoelectric coefficient increases with increasing (001)-orientation volume fraction.

本文言語英語
論文番号075502
ジャーナルJapanese journal of applied physics
51
7 PART 1
DOI
出版ステータス出版済み - 7月 2012

!!!All Science Journal Classification (ASJC) codes

  • 工学一般
  • 物理学および天文学一般

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