Epitaxial growth of (Al_x Ga_{1- x} )₂O₃thin films on sapphire substrates by plasma assisted pulsed laser deposition

Physics

• Pulsed Laser Deposition 100%
• Energy Gaps (Solid State) 100%
• Atomic Force Microscopy 33%
• Spectrophotometry 33%
• Utilization 33%
• Plane 33%

Engineering

• Sapphire Substrate 66%
• Ray Photoelectron Spectroscopy 66%
• Measurer 33%
• Applications 33%
• Lower Temperature 33%
• Ray Diffraction 33%

Material Science

• Liquid Films 100%
• Power Device 66%
• Devices 33%
• Epitaxy 33%