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Electronic data acquisition and operational control system for time-of-flight sputtered neutral mass spectrometer

  • Ken ichi Bajo
  • , Osamu Fujioka
  • , Satoru Itose
  • , Morio Ishihara
  • , Kiichiro Uchino
  • , Hisayoshi Yurimoto

研究成果: ジャーナルへの寄稿学術誌査読

抄録

A new electric data acquisition and operational control system was developed for time-of-flight sputtered neutral mass spectrometry (TOF-SNMS). The system is designed for high-speed data acquisition, data processing, and data streaming. The developed system is constructed on an NI-PXI platform and provides timing clocks for the TOF-SNMS operation. The system performs data processing of noise suppression and ion counting while acquiring TOF mass spectrum for 13-microsecond length at sampling rate of 3 GS/s for every 1 millisecond. In addition, the system acquires and records TOF mass spectrum of 60-microsecond length at sampling rate of 3 GS/s for every 1 millisecond without data processing. The system detects single ion signals from accumulated TOF mass spectrum of 107 times and counts up to 10 ions accurately from a single event of TOF mass spectrum.

本文言語英語
ページ(範囲)35-39
ページ数5
ジャーナルSurface and Interface Analysis
51
1
DOI
出版ステータス出版済み - 1月 2019

!!!All Science Journal Classification (ASJC) codes

  • 化学一般
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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