抄録
A zeolite ion source has been developed for plasma diagnostics. Extracted beam current is increased by a factor of ∼10 after redesigning the ion source structure and improving the method to make emitter material (zeolite). The article introduces an experiment on making desirable ion emitter, and describes the properties of the developed ion source.
本文言語 | 英語 |
---|---|
論文番号 | 03B704 |
ジャーナル | Review of Scientific Instruments |
巻 | 77 |
号 | 3 |
DOI | |
出版ステータス | 出版済み - 3月 2006 |
外部発表 | はい |
!!!All Science Journal Classification (ASJC) codes
- 器械工学