Development of ultra-lightweight X-ray telescopes fabricated with MEMS technologies for GEO-X

We have been developing ultra-lightweight Wolter type-I X-ray telescopes fabricated with MEMS technologies for GEO-X (GEOspace X-ray imager) which is a small satellite mission to perform soft X-ray imaging spectroscopy of the entire Earth's magnetosphere. The telescope is our original type of micropore optics and possesses lightness (∼5 g), a short focal length (∼250 mm), and a wide field of view (∼5^◦ × ∼5^◦). The MEMS X-ray telescope is made of 4-inch Si (111) wafers. The Si wafer is first processed by deep reactive ion etching, which has numerous curvilinear micropores (a 20-µm width) whose sidewalls are utilized as X-ray reflective mirrors. High-temperature hydrogen annealing and chemical mechanical polishing processes are applied to make those sidewalls smooth and flat enough to reflect X-rays. After that, the wafer is plastic-deformed into a spherical shape and Pt-coated by a plasma atomic layer deposition process to focus X-rays with high reflectivity. Finally, we assemble two optics bent with different curvatures (1000- and 333-mm radii) and complete the Wolter type-I telescope. We optimized each process and conducted an X-ray irradiation test to assemble the full-processed optics into an EM telescope for the GEO-X mission, which enabled to complete the telescope to achieve an angular resolution of ∼4.8 arcmin in FWHM in the assembled telescope. We report on our latest development status and the X-ray imaging performance of the GEO-X EM telescope.