Development of high lateral and wide angle resolved hard X-ray photoemission spectroscopy at BL47XU in SPring-8

Eiji Ikenaga, Masaaki Kobata, Hiroyuki Matsuda, Takeharu Sugiyama, Hiroshi Daimon, Keisuke Kobayashi

研究成果: ジャーナルへの寄稿学術誌査読

76 被引用数 (Scopus)

抄録

In this study, we have realized a high lateral resolution and wide-angle-resolved hard X-ray photoelectron spectroscopy (HAXPES) facility at BL47XU in SPring-8. The system uses Kirkpatrick-Baez focusing mirrors to achieve a beam size of 1.0 μm (horizontal) × 0.98 μm (vertical) at the photon energy of 7.94 keV and a wide-acceptance-angle objective lens installed in front of the electron energy analyzer. The objective lens system, which we had been developed originally and has achieved a total acceptance angle of ±34 with a resolution better than that of an acceptance angle of 1.5. The performance of this system was evaluated through core spectra measurements of a typical multi-layered sample of Ir (8 nm)/HfO2 (2.2 nm)/thickness-graded SiO2 (0-10 nm)/Si(0 0 1).

本文言語英語
ページ(範囲)180-187
ページ数8
ジャーナルJournal of Electron Spectroscopy and Related Phenomena
190
PART B
DOI
出版ステータス出版済み - 10月 2013
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 放射線
  • 原子分子物理学および光学
  • 凝縮系物理学
  • 分光学
  • 物理化学および理論化学

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