Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

Masanori Shinohara; Taisuke Tominaga; Hayato Shimomura; Takeshi Ihara; Yoshihito Yagyu; Tamiko Ohshima; Hiroharu Kawasaki

doi:10.1002/ecj.12157

Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

Masanori Shinohara, Taisuke Tominaga, Hayato Shimomura, Takeshi Ihara, Yoshihito Yagyu, Tamiko Ohshima, Hiroharu Kawasaki

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

抄録

A hydrophilic amorphous carbon film was deposited with plasma-enhanced chemical vapor deposition using diisopropylether ((i-C ₃ H ₇ ) ₂ O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp ³ -hydrocarbon components, which is the same as the isopropyl group in the source molecule. On the other hand, C═O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C─O─C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule.

本文言語	英語
ページ（範囲）	3-9
ページ数	7
ジャーナル	Electronics and Communications in Japan
巻	102
号	4
DOI	https://doi.org/10.1002/ecj.12157
出版ステータス	出版済み - 4月 2019
外部発表	はい

!!!All Science Journal Classification (ASJC) codes

信号処理
物理学および天文学（全般）
コンピュータネットワークおよび通信
電子工学および電気工学
応用数学

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10.1002/ecj.12157

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title = "Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction",

abstract = " A hydrophilic amorphous carbon film was deposited with plasma-enhanced chemical vapor deposition using diisopropylether ((i-C 3 H 7 ) 2 O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp 3 -hydrocarbon components, which is the same as the isopropyl group in the source molecule. On the other hand, C═O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C─O─C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule.",

author = "Masanori Shinohara and Taisuke Tominaga and Hayato Shimomura and Takeshi Ihara and Yoshihito Yagyu and Tamiko Ohshima and Hiroharu Kawasaki",

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AU - Shinohara, Masanori

AU - Tominaga, Taisuke

AU - Shimomura, Hayato

AU - Ihara, Takeshi

AU - Yagyu, Yoshihito

AU - Ohshima, Tamiko

AU - Kawasaki, Hiroharu

N1 - Funding Information: This study was funded in part by a JSPS Grant-in-Aid for Scientific Research (16K04994). We express our appreciation to JSPS for their support. Publisher Copyright: © 2019 Wiley Periodicals, Inc.

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Y1 - 2019/4

N2 - A hydrophilic amorphous carbon film was deposited with plasma-enhanced chemical vapor deposition using diisopropylether ((i-C 3 H 7 ) 2 O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp 3 -hydrocarbon components, which is the same as the isopropyl group in the source molecule. On the other hand, C═O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C─O─C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule.

AB - A hydrophilic amorphous carbon film was deposited with plasma-enhanced chemical vapor deposition using diisopropylether ((i-C 3 H 7 ) 2 O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp 3 -hydrocarbon components, which is the same as the isopropyl group in the source molecule. On the other hand, C═O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C─O─C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule.

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Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

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!!!All Science Journal Classification (ASJC) codes

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