Critical factors for nucleation and vertical growth of two dimensional nano-graphene sheets employing a novel Ar⁺ beam with hydrogen and fluorocarbon radical injection

Two-dimensional nano-graphene sheets, standing vertically on carbon nanowalls (CNWs) substrates, were synthesized by multi-beam chemical vapor deposition employing three types of irradiation, Ar⁺ beam with tunable fluxes and energies, hydrogen (H) and fluorocarbon radicals, which could be independently controlled. The CNWs growth processes were investigated by changing the Ar⁺ irradiation conditions. Irradiation of Ar ⁺ ions with appropriate fluxes and energies on fluorocarbon layers evolved nanoislands for growth of the CNWs. By tuning the fluxes and energies of the incident Ar⁺ on amorphous carbon nanoislands, critical factors for controlling nucleation and growth of CNWs were determined.