Control of large area VHF plasma produced at high pressure

Tatsuyuki Nishimiya; Tsukasa Yamane; Yoshiaki Takeuchi; Yasuhiro Yamauchi; Hiromu Takatsuka; Hiroshi Muta; Kiichiro Uchino; Yoshinobu Kawai

doi:10.1016/j.tsf.2011.01.379

Control of large area VHF plasma produced at high pressure

Tatsuyuki Nishimiya, Tsukasa Yamane, Yoshiaki Takeuchi, Yasuhiro Yamauchi, Hiromu Takatsuka, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai

電気理工学

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

8 被引用数 (Scopus)

抄録

The control of very high frequency (VHF) discharge plasma at high pressures was attempted by loading a variable capacitor to the end of the multi rod electrode with which VHF plasma (frequency 60 MHz) was produced. It was found that the discharge region is controlled with the variable capacitor and VHF plasma uniform over 1 m is produced at high pressures.

本文言語	英語
ページ（範囲）	6931-6934
ページ数	4
ジャーナル	Thin Solid Films
巻	519
号	20
DOI	https://doi.org/10.1016/j.tsf.2011.01.379
出版ステータス	出版済み - 8月 1 2011

!!!All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
表面および界面
表面、皮膜および薄膜
金属および合金
材料化学

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10.1016/j.tsf.2011.01.379

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AU - Nishimiya, Tatsuyuki

AU - Yamane, Tsukasa

AU - Takeuchi, Yoshiaki

AU - Yamauchi, Yasuhiro

AU - Takatsuka, Hiromu

AU - Muta, Hiroshi

AU - Uchino, Kiichiro

AU - Kawai, Yoshinobu

PY - 2011/8/1

Y1 - 2011/8/1

N2 - The control of very high frequency (VHF) discharge plasma at high pressures was attempted by loading a variable capacitor to the end of the multi rod electrode with which VHF plasma (frequency 60 MHz) was produced. It was found that the discharge region is controlled with the variable capacitor and VHF plasma uniform over 1 m is produced at high pressures.

AB - The control of very high frequency (VHF) discharge plasma at high pressures was attempted by loading a variable capacitor to the end of the multi rod electrode with which VHF plasma (frequency 60 MHz) was produced. It was found that the discharge region is controlled with the variable capacitor and VHF plasma uniform over 1 m is produced at high pressures.

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ER -

Control of large area VHF plasma produced at high pressure

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!!!All Science Journal Classification (ASJC) codes

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